@article{Pashaev2014technology, author={Pashaev, I..}, title={Technology producing multilayer metallization on silicon surface using amorphous alloy}, journal={Actual directions of scientific researches of the XXI century: theory and practice}, publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov}, year={2014}, pages={195-197}, volume={2}, issue={4}, }