TY  JOUR
TI  Technology producing multilayer metallization on silicon surface using amorphous alloy
KW   metallization
KW  silicon
KW  amorphous alloy
JO  Actual directions of scientific researches of the XXI century: theory and practice
AU  Pashaev, I..
PY  2014
IS  2
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov