TY JOUR TI Computer simulation of the operability of finishing procedures and parasitic elements in the hardware and software complex of chip design KW L-shaped structures KW F-shaped structures KW sizing KW nosizing KW dummy area KW CAD KW GDSII KW CAD PACK JO Modeling of systems and processes AU Yagodkin, A.S. AU Litvinov, N.N. AU Ivanin, P.S. AU Groshev, A.S. PY 2024 IS 17 PB FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov