LDR 00638naa#a2200181#i#450# 001 EN\\bibl\2847 003 /en/manage/index 005 20241130090956.6 011 ## _a2308-8877 100 ## _a20140616b2014####ek#y0engy0150####ca 101 0# _aRUS 102 ## _aRU 200 1# _aTechnology producing multilayer metallization on silicon surface using amorphous alloy _eJournal article 210 1# _aVoronezh _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov _d2014 215 ## _a2 с. 608 ## _aJournal article _2local 700 #1 _aPashaev _gI. 856 4# _atest.editorum.ru _u/en/manage/index