00890naa#a2200229#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200013300111210008500244215001000329608002700339675014000366700001800506700003100524700002300555700002200578700002100600856003900621EN\\bibl\29946/en/manage/index20240922073851.7##a2071-7318##a20160125b2016####ek#y0engy0150####ca##aRU1#aEFFECT OF NITROGEN CONCENTRATION IN MAGNETRON SPUTTERING ON STRUCTURE ALN-FILMS DEPOSITED ON SAPPHIRE SUBSTRATEeJournal article1#aBelgorodcBelgorod State Technological University named after V.G. Shukhovd2016##a5 с.##aJournal article2local##aХимическая технология. Химическая промышленность. Родственные отрасли. 66#1aNarcevgV.M. #1aZaycevgSergey Viktorovich#1aProhorenkovgD. S.#1aEvtushenkogE. I.#1aVaschilingV.S. 4#atest.editorum.ruu/en/manage/index