00781naa#a2200205#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200012600111210013700237215001000374608002700384675006700411700002000478700002300498700001500521856003900536EN\\bibl\30317/en/manage/index20241125154530.1##a2219-0767##a20190826b2019####ek#y0engy0150####ca##aRU1#aREVIEW OF SUBMICRON VLSI CAD SOFTWARE AND ACCOUNTING FOR ELECTROPHYSICAL EFFECTS OF DEEP SUBMICRON LEVELeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2019##a7 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aZolnikovgV. K.#1aSavchenkogAndrey #1aKulaygA. 4#atest.editorum.ruu/en/manage/index