00948naa#a2200229#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200020900111210013700320215001000457608002700467675006700494700001600561700001600577700003900593700001900632700002800651856003900679EN\\bibl\37765/en/manage/index20241125212216.1##a2219-0767##a20200526b2020####ek#y0engy0150####ca##aRU1#aDEVELOPMENT OF THE DESIGN ENVIRONMENT AND ASSESSMENT OF THE MANUFACTURABILITY OF THE CHIP PRODUCTION TAKING INTO ACCOUNT THE RESISTANCE TO SPECIAL FACTORS ON THE EXAMPLE OF VLSI 1867VTS6FeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2020##a5 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aSklyargV. #1aSmerekgV. #1aZolnikovgKonstantin Vladimirovich#1aChernovgD. N.#1aYagodkingA. Sergeevich4#atest.editorum.ruu/en/manage/index