00711naa#a2200193#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200007200111210013700183215001000320608002700330675006700357700002200424700003200446856003900478EN\\bibl\45931/en/manage/index20250327082637.4##a2219-0767##a20210922b2021####ek#y0engy0150####ca##aRU1#aTechnologies for creating radiation-resistant VLSIeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2021##a6 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aZhuravlevagI. V.#1aPopovagElena Aleksandrovna4#atest.editorum.ruu/en/manage/index