00774naa#a2200193#i#4500001001500000003001700015005001700032011001400049100004100063101000800104102000700112200016700119210010800286215001100394608002700405675008500432700002400517856003900541EN\\bibl\52852/en/manage/index20250414082949.1##a2587-9936##a20190325b2019####ek#y0engy0150####ca0#aRUS##aRU1#aMethod of metrological characteristics determination of probe system for wafer-level S-parameters measurement of microwave nanoelectronic deviceseJournal article1#aSevastopolcFederal State Educational Institution of Higher Education Sevastopol State Universityd2019##a10 с.##aJournal article2local##aЮстировка, градуировка и поверка. 621.317.089.6zRUS#1aSavingAleksandr A 4#atest.editorum.ruu/en/manage/index