00741naa#a2200217#i#450# EN\\bibl\53379 /en/manage/index 20250328073440.5 2587-9936 20220928b2022####ek#y0engy0150####ca RU INTEGRATED OPTICAL WAVEGUIDES BASED ON Si3N4 FILMS Journal article Sevastopol Federal State Educational Institution of Higher Education Sevastopol State University 2022 6 с. Journal article local Фотоэлектроника. 621.383 Kulinich Ivan V. Somogonyants Alina A. Shesterikov Evgeniy V. Mokhovikov Denis Maksimovich test.editorum.ru /en/manage/index