01046naa#a2200253#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200010000111210013700211215001100348608002700359675014600386700003100532700003400563700003400597700003500631700002000666700003500686700003200721856003900753EN\\bibl\55487/en/manage/index20250416054229.3##a2219-0767##a20221213b2022####ek#y0engy0150####ca##aRU1#aFeatures of the design of microcircuits made using deep-submicron technologieseJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2022##a10 с.##aJournal article2local##aПрикладные информационные (компьютерные) технологии. 004.9aЭлектротехника. 621.3#1aAchkasovgA. Vladimirovich#1aSolodilovgMaksim Vital'evich#1aLitvinovgNikolay Nikolaevich#1aChubunovgPavel Aleksandrovich#1aZolnikovgV. K.#1aShehovcovgDmitriy Vital'evich#1aBordyuzhagOleg Leonidovich4#atest.editorum.ruu/en/manage/index