LDR 00750naa#a2200217#i#450# 001 EN\\bibl\6427 003 /en/manage/index 005 20241122110336.5 011 ## _a2219-0767 100 ## _a20150702b2015####ek#y0engy0150####ca 101 0# _aRUS 102 ## _aRU 200 1# _aALGORITHMIC BASIS OF MODELING FAILURES IN DEEP-SUBMICRON TECHNOLOGIES _eJournal article 210 1# _aVoronezh _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov _d2015 215 ## _a2 с. 608 ## _aJournal article _2local 700 #1 _aChubur _gK. A. 700 #1 _aYankov _gA. Il'ich 700 #1 _aZolnikov _gKonstantin Vladimirovich 700 #1 _aAchkasov _gA. Vladimirovich 856 4# _atest.editorum.ru _u/en/manage/index