00683naa#a2200181#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200019100111210005800302215001000360608002700370675002900397700003600426856003900462EN\\bibl\82517/en/manage/index20250619082214.4##a2782-1900##a20211223b2021####ek#y0engy0150####ca##aRU1#aThe role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorineeJournal article1#aYaroslavlcYaroslavl State Technical Universityd2021##a8 с.##aJournal article2local##aсредняя. 66-914.5#1aSitanovgDmitry Vyacheslavovich4#atest.editorum.ruu/en/manage/index